our services
Damage prevention tube
- Prevent tube damage due to human error..
- Replacement work is possible while the equipment is in operation..
- Compatible with all tube sizes.
Drain leak detect system
- In the event of a small amount of leakage from the drain connection, chemical liquid can be detected.
- If a leak occurs, the alarm goes off from the equipment and can be checked immediately.
- Secondary accidents can be prevented in the event of a leak.
Vision master system.
- Wafer position inspection.
- Inspection of cup fumes and various foreign substances.
- Chemical dispense and flow inspection.
- Inspection of Nozzle suck-back status and foreign substances.
Magnetic Shielding Chamber
Sales Performance
Applications
- A proven track record of 240 chambers supplied worldwide and 25 years of extensive experience and accumulated know-how.
High-sensitivity equipment utilizing electron beams
EB lithography systems, EB wafer systems, and SEM/TEM inspection equipment.
EMI Canceling System
- By using EMI canceling coils along with an EMI canceller controller and probes, the system eliminates magnetic fields generated inside the chamber.